Measurement of Au sputtering yields by neon with low-energy mass analyzed ion beam system

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Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871 Osaka [1 ]
不详 [2 ]
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Shinku | 2007年 / 3卷 / 217-219期
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10.3131/jvsj.50.217
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