MEASUREMENTS OF SPUTTERING YIELDS FOR LOW-ENERGY PLASMA IONS

被引：0

作者：

NISHI, M ^{[1
]}

ROSENGAUS, E ^{[1
]}

YAMADA, M ^{[1
]}

SUCKEWER, S ^{[1
]}

机构：

[1] PRINCETON UNIV,PRINCETON,NJ 08540

来源：

BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1978年 / 23卷 / 07期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：894 / 894

页数：1

共 50 条

[1] LOW-ENERGY SPUTTERING YIELDS IN HG
WEHNER, GK
PHYSICAL REVIEW LETTERS, 1958, 1 (10) : 385 - 385
[2] LOW-ENERGY SPUTTERING YIELDS IN HG
WEHNER, GK
PHYSICAL REVIEW, 1958, 112 (04): : 1120 - 1124
[3] Enhanced sputtering yields of carbon due to accumulation of low-energy Xe ions
Kenmotsu, T.
Wada, M.
Hyakutake, T.
Muramoto, T.
Nishida, M.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (8-9): : 1717 - 1720
[4] A SIMPLE FORMULA FOR LOW-ENERGY SPUTTERING YIELDS
STEINBRUCHEL, C
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 36 (01): : 37 - 42
[5] Low-energy sputtering yields of tungsten and tantalum
Doerner, RP
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2005, 23 (06): : 1545 - 1547
[6] Sputtering of ice by low-energy ions
Fama, M.
Shi, J.
Baragiola, R. A.
SURFACE SCIENCE, 2008, 602 (01) : 156 - 161
[7] SIMPLE FORMULA FOR LOW-ENERGY SPUTTERING YIELDS.
Steinbruechel, Ch.
Applied Physics A: Solids and Surfaces, 1985, A 36 (01): : 37 - 42
[8] LOW-ENERGY SELF-SPUTTERING YIELDS OF NICKEL
HECHTL, E
BAY, HL
BOHDANSKY, J
APPLIED PHYSICS, 1978, 16 (02): : 147 - 150
[9] SPUTTERING OF ADSORBED MONOLAYERS BY LOW-ENERGY IONS
BRODKORB, W
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1986, 94 (01): : 83 - 93
[10] LOW-ENERGY SPUTTERING OF COBALT BY CESIUM IONS
RAY, P
MUKHERJEE, A
HANDOO, A
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 : 299 - 301