MEASUREMENTS OF SPUTTERING YIELDS FOR LOW-ENERGY PLASMA IONS

被引：0
|
作者：
NISHI, M [1 ]
ROSENGAUS, E [1 ]
YAMADA, M [1 ]
SUCKEWER, S [1 ]
机构：
[1] PRINCETON UNIV,PRINCETON,NJ 08540
来源：
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1978年 / 23卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：894 / 894
页数：1
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