共 50 条
- [44] HIGH-ASPECT-RATIO SI ETCHING FOR MICROSENSOR FABRICATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 834 - 838
- [49] Recent advance in high-aspect-ratio composite wing Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology, 2017, 49 (10): : 1 - 14
- [50] A hybrid high-aspect-ratio trench standard template Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2023, 52 (04):