High-aspect-ratio rotary polygon micromotor scanners

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Microfabrication Laboratory, Dept. Elec. Eng. Comp. Sci., Case W., Cleveland, OH, United States [1 ]
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Sens Actuators A Phys | / 1卷 / 73-79期
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Number:; DABT63-95-C0070; Acronym:; DARPA; Sponsor: Defense Advanced Research Projects Agency; -;
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