Microstructures and mechanical properties of vanadium carbide films grown by reactive magnetron sputtering

被引：0
|
作者：
Li, Guangze [1 ]
Wu, Xiaoyan [1 ]
Chen, Yanghui [1 ]
Li, Geyang [1 ]
机构：
[1] State Key Lab. of Metal Matrix Composites, Shanghai Jiaotong University, Shanghai 200240, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2009年 / 29卷 / 02期
关键词：
Microstructure;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：168 / 172
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