Effect of gel-films-thickness and sintering conditions on the crystal structure and microstructure of alkoxy-derived BaTiO3 thin films

被引：0
|
作者：
Tanaka, Kiyotaka [1 ]
Suzuki, Kazuyuki [1 ]
Kato, Kazumi [1 ]
机构：
[1] National Institute of Advanced Industrial Science and Technology (AIST), Advanced Manufacturing Research Institute, 2266-98 Anagahora, Shimo-shidami, Moriyama-ku, Nagoya, Aichi 463-8560, Japan
来源：
Key Engineering Materials | 2009年 / 388卷
关键词：
Sintering - Sol-gels - Heating - Perovskite - Grain size and shape - Film thickness - Heating rate - Barium titanate - Crystal microstructure - Thin films;
D O I：
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学科分类号：
摘要：
Various BaTiO3 thin films were fabricated at 650C by using different conditions such as the heating rate and alkoxy-derived gel-film thickness. In this study, the spin-coating and calcination step were repeated several times to control the gel-films thickness. And then the one-sintering was carried out with various heating rates. BaTiO3 films with perovskite phase were obtained by using the heating rate of 100C/sec and the surface morphology became rough with increase of gel-film thickness. We considered that the change of root mean square (rms) roughness and cross-sectional profiles by various heating rates was caused by densification.
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页码：171 / 174
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