Effect of the nano-sized BaTiO3 gel particles on dielectric properties of thin films

被引：0
|
作者：
Makino, T
Arimura, M
Yamashita, Y
Fujiyoshi, K
Kuwabara, M
机构：
[1] Fukuoka Ind Technol Ctr, Mech & Elect Res Inst, Yahatanishi Ku, Kitakyushu, Fukuoka 8070831, Japan
[2] Fukuoka Ind Technol Ctr, Chem & Text Ind Res Inst, Fukuoka 8188540, Japan
[3] Univ Tokyo, Fac Engn, Dept Mat Engn, Bunkyo Ku, Tokyo 1138656, Japan
来源：
ELECTROCERAMICS IN JAPAN VII | 2004年 / 269卷
关键词：
barium titanate; gel; particle size; thin film; dielectric constant;
D O I：
10.4028/www.scientific.net/KEM.269.109
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We synthesized nanocrystalline BaTiO3 particles by sol-gel process and made evaluations concerning their size and crystallinity with TEM, XRD and small angle X-ray scattering (SAXS). The BaTiO3 particles were found to be composed of well-crystallized particles with sizes greater than 5nm and poorly-crystallized (almost amorphous) particles smaller than 3nm. We obtained BaTiO3 ceramic thin films of around 500nm in thickness by spin coating using a suspension of the nanocrystalline particles, followed by firing at 800degreesC. The quality of BaTiO3 films prepared was strongly dependent on the volume ratio of well-crystallized particles in the suspension. The film which obtained the highest quality, exhibited a capacitance of 530nF/cm(2) (at 1 kHZ).
引用
收藏
页码：109 / 112
页数：4
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