Photosensitive materials based on copolymers of vinyl cyclopropyl ether with maleic anhydride

被引：0

作者：

Shakhnazarli, R.Z. ^{[1
]}

Alieva, A.A. ^{[1
]}

Nazaraliev, Kh.G. ^{[1
]}

Guliev, A.M. ^{[1
]}

机构：

[1] Institute of Polymeric Materials, National Academy of Sciences of Azerbaijan, Sumgaiyt, Azerbaijan

来源：

| 1600年 / Maik Nauka-Interperiodica Publishing卷 / 81期

关键词：

Copolymers prepared from vinyl cyclopropyl ether and maleic anhydride were modified with allyl alcohol; and the products obtained were thermally cross-linked with styrene. Photoresists were prepared from these copolymers; and their photolithographic parameters were determined. © 2008 MAIK Nauka;

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摘要：

Journal article (JA)

引用

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