Large dynamic range nanopositioning using iterative learning control

被引：0
|
作者：
Parmar, G. [1 ]
Hiemstra, D.B. [1 ]
Awtar, S. [1 ]
机构：
[1] Precision Systems Design Laboratory, Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, United States
来源：
ASME 2012 5th Annual Dynamic Systems and Control Conference Joint with the JSME 2012 11th Motion and Vibration Conference, DSCC 2012-MOVIC 2012 | 2012年 / 1卷
关键词：
D O I：
10.1115/DSCC2012-MOVIC2012-8676
中图分类号：
学科分类号：
摘要：
32
引用
收藏
页码：897 / 905
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