共 50 条
- [1] Development of aerial image based aberration measurement technique [J]. Optical Microlithography XVIII, Pts 1-3, 2005, 5754 : 1659 - 1669
- [3] In-situ Aberration Measurement Technique Based on Aerial Image with Optimized Source [J]. OPTICAL SYSTEMS DESIGN 2012, 2012, 8550
- [4] In situ aberration measurement technique based on principal component analysis of aerial image [J]. OPTICS EXPRESS, 2011, 19 (19): : 18080 - 18090
- [5] Aberration measurement technique based on an analytical linear model of a through-focus aerial image [J]. OPTICS EXPRESS, 2014, 22 (05): : 5623 - 5634
- [7] Aerial image model and application to aberration measurement [J]. OPTICAL MICROLITHOGRAPHY XXIII, 2010, 7640
- [9] Trefoil aberration measurement of lithographic projection optics based on linewidth asymmetry of the aerial image [J]. OPTIK, 2010, 121 (19): : 1739 - 1742
- [10] The Measurement of Liquid Level Based on Peak Image Recognition Technique [J]. MACHINE DESIGN AND MANUFACTURING ENGINEERING, 2012, 566 : 505 - 510