Zero temperature coefficient of frequency surface acoustic wave resonator for narrow-duplex-gap application on SiO2/Al/LiNbO3 structure

被引：0
|
作者：
Nakanishi, Hidekazu [1 ,2 ]
Nakamura, Hiroyuki [1 ]
Tsurunari, Tetsuya [1 ]
Fujiwara, Joji [1 ]
Hamaoka, Yosuke [1 ]
Hashimoto, Ken-Ya [2 ]
机构：
[1] Panasonic Electronic Devices Co., Ltd., Kadoma, Osaka 571-8506, Japan
[2] Graduate School of Engineering, Chiba University, Chiba 263-8522, Japan
来源：
Japanese Journal of Applied Physics | 2011年 / 50卷 / 7 PART 2期
关键词：
Compendex;
D O I：
07HD13
中图分类号：
学科分类号：
摘要：
Silica
引用
收藏
相关论文
共 50 条
  • [41] High-resolution, high-linearity temperature sensor using surface acoustic wave device based on LiNbO3/SiO2/Si substrate
    Tian, Xiang-Guang
    Liu, Heng
    Tao, Lu-Qi
    Yang, Yi
    Jiang, Hanjun
    Ren, Tian-Ling
    AIP ADVANCES, 2016, 6 (09):
  • [42] Small-sized SAW Duplexers with Wide Duplex Gap on a SiO2/Al/LiNbO3 structure by using Novel Rayleigh-mode Spurious Suppression Technique
    Nakanishi, H.
    Nakamura, H.
    Hamaoka, Y.
    Kamiguchi, H.
    Iwasaki, Y.
    2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008, : 1588 - +
  • [43] Suppression of Transverse-Mode Spurious Responses for SAW Resonators on SiO2/Al/LiNbO3 Structure by Selective Removal of SiO2
    Nakamura, Hiroyuki
    Nakanishi, Hidekazu
    Goto, Rei
    Hashimoto, Ken-ya
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2011, 58 (10) : 2188 - 2193
  • [44] ZERO TEMPERATURE COEFFICIENT SURFACE-ACOUSTIC-WAVE DELAY LINES ON ALN/AL2O3.
    SUGAI, KAZUYOSHI
    TSUBOUCHI, KAZUO
    MIKOSHIBA, NOBUO
    1982, V 21 (N 5): : 303 - 304
  • [45] 3-DIMENSIONAL REPRESENTATIONS OF THE TEMPERATURE BULK WAVE PROPERTIES OF LITAO3, LINBO3, SIO2, AL2O3 AND DIAMOND
    MURPHY, J
    MCAVOY, BR
    FELDMAN, RB
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1980, 27 (03): : 153 - 153
  • [46] Electrical characteristics of SAW filters on SiO2/Al/LiNbO3 structure for inverter multiplex transmission systems
    Kobayashi, Fumiya
    Goka, Shigeyoshi
    Wada, Keiji
    Kakio, Shoji
    2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2017,
  • [47] NONLINEAR SURFACE ACOUSTIC-WAVE DEVICE CONFIGURATIONS ON LINBO3 AND ALN-AL2O3
    ADKINS, LR
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1973, SU20 (01): : 64 - &
  • [48] Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3structure
    Gong, Keyuan
    Wu, Zhaohui
    Wong, Yu-Po
    Li, Yawei
    Liang, Qi
    Bao, Jingfu
    Hashimoto, Ken-Ya
    Japanese Journal of Applied Physics, 2022, 61 (SG):
  • [49] X band film bulk acoustic wave resonator based on single crystalline LiNbO3 thin films with SiO2/Ta2O5 reflector
    Li, Peiran
    Lv, Lu
    Qian, Yicong
    Han, Xiaoyu
    Wei, Zijie
    Fan, Wei
    Chen, Shujian
    Yin, Xiaogui
    Zheng, Qin
    Jia, Na
    Zhang, Qingyu
    Zhu, Fen
    MATERIALS EXPRESS, 2022, 12 (03) : 504 - 510
  • [50] A small-sized SAW duplexer on a SiO2/IDT/LiNbO3 structure for wideband CDMA application
    Nakamura, H.
    Nakanishi, H.
    Tsurunari, T.
    Matsunami, K.
    Iwasaki, Y.
    2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, : 488 - +
12345