Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3structure

被引：0
|
作者：
Gong, Keyuan [1 ]
Wu, Zhaohui [1 ]
Wong, Yu-Po [2 ]
Li, Yawei [1 ]
Liang, Qi [1 ]
Bao, Jingfu [1 ]
Hashimoto, Ken-Ya [1 ,2 ]
机构：
[1] School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu,611731, China
[2] Graduate School of Engineering, Chiba University, Chiba,263-8522, Japan
来源：
Japanese Journal of Applied Physics | 2022年 / 61卷 / SG期
关键词：
Compendex;
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摘要：
Silica
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