Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3structure

被引：0
|
作者：
Gong, Keyuan [1 ]
Wu, Zhaohui [1 ]
Wong, Yu-Po [2 ]
Li, Yawei [1 ]
Liang, Qi [1 ]
Bao, Jingfu [1 ]
Hashimoto, Ken-Ya [1 ,2 ]
机构：
[1] School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu,611731, China
[2] Graduate School of Engineering, Chiba University, Chiba,263-8522, Japan
来源：
Japanese Journal of Applied Physics | 2022年 / 61卷 / SG期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Silica
引用
收藏
相关论文
共 50 条
  • [31] TCF-IMPROVED SH0 MODE ACOUSTIC RESONATORS BASED ON 30°YX-LINBO3/SIO2 MEMBRANE
    Wu, Shuxian
    Wu, Zonglin
    Qian, Hangyu
    Bao, Feihong
    Tang, Gongbin
    Xu, Feng
    Zou, Jie
    2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 631 - 634
  • [32] High-Performance Surface Acoustic Wave Devices Using LiNbO3/SiO2/SiC Multilayered Substrates
    Shen, Junyao
    Fu, Sulei
    Su, Rongxuan
    Xu, Huiping
    Lu, Zengtian
    Xu, Zhibin
    Luo, Jingting
    Zeng, Fei
    Song, Cheng
    Wang, Weibiao
    Pan, Feng
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2021, 69 (08) : 3693 - 3705
  • [33] Suppression Technique of fast-shear-wave Spurious Responses in SAW Resonators on SiO2/Al/LiNbO3 Structure
    Fujiwara, J.
    Goto, R.
    Nakamura, H.
    Tsurunari, T.
    Nakanishi, H.
    Hamaoka, Y.
    2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2012, : 799 - 802
  • [34] THE LEAKY SURFACE-WAVE IN SIO2/49-DEGREES-Y-X LINBO3 STRUCTURE
    JIANG, ZL
    WU, WQ
    SHUI, YA
    YIN, JH
    IEEE 1989 ULTRASONICS SYMPOSIUM : PROCEEDINGS, VOLS 1 AND 2, 1989, : 295 - 298
  • [35] A Full-Wave Analysis of Surface Acoustic Waves Propagating on a SiO2 Overlay/Metal Grating/Rotated YX-LiNbO3 Substrate Structure
    Wang, Yiliu
    Hashimoto, Ken-ya
    Omori, Tatsuya
    Yamaguchi, Masatsune
    2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008, : 1211 - 1214
  • [36] Model parameter extraction of lateral propagating surface acoustic waves with coupling on SiO2/grating/LiNbO3 structure
    Zhang, Benfeng
    Han, Tao
    Li, Xinyi
    Huang, Yulin
    Omori, Tatsuya
    Hashimoto, Ken-ya
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 57 (07)
  • [37] Design and fabrication of a SiO2/ST-cut quartz love mode surface acoustic wave transducer for operation in liquid media
    Kalantar-zadeh, K
    Wlodarski, W
    Holland, A
    Austin, M
    Mendis, H
    COMMAD 2000 PROCEEDINGS, 2000, : 308 - 311
  • [38] High-resolution, high-linearity temperature sensor using surface acoustic wave device based on LiNbO3/SiO2/Si substrate
    Tian, Xiang-Guang
    Liu, Heng
    Tao, Lu-Qi
    Yang, Yi
    Jiang, Hanjun
    Ren, Tian-Ling
    AIP ADVANCES, 2016, 6 (09):
  • [39] Analysis of Rayleigh-Mode Spurious Response Using Finite Element Method/Spectrum Domain Analysis for Surface Acoustic Wave Resonator on Nonflat SiO2/Al/LiNbO3 Structure
    Nakamura, Hiroyuki
    Nakanishi, Hidekazu
    Goto, Rei
    Hashimoto, Ken-ya
    Yamaguchi, Masatsune
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (07)
  • [40] PHASE AND AMPLITUDE RELATIONS BETWEEN FUNDAMENTAL AND 2ND HARMONIC ACOUSTIC SURFACE-WAVES ON SIO2 AND LINBO3
    ALIPPI, A
    PALMA, A
    PALMIERI, L
    SOCINO, G
    JOURNAL OF APPLIED PHYSICS, 1977, 48 (06) : 2182 - 2190
12345