High temperature stable acoustic surface wave substrates of SiO2/LiNbO3 structure with super high coupling

被引：41

作者：

Yamanouchi, K ^{[1
]}

Ishii, T ^{[1
]}

机构：

[1] Tohoku Inst Technol, Taihaku Ku, Sendai, Miyagi 9828577, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 5B期

关键词：

surface acoustic wave; SiO2/LiNbO3; substrate; high coupling; zero TCF; wide band SAW filter;

D O I：

10.1143/JJAP.41.3480

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this study, in order to improve the temperature coefficient of frequency (TCF), the propagation characteristics of SiO2/Rotated Y-cut, X-propagating LiNbO3 leaky surface acoustic wave (SAW) substrates with a large electromechanical Coupling coefficient (k(2)), zero attenuation and zero TCF are theoretically investigated. The results showed a large k(2) of more than 0.2 (zero k(2) of Rayleigh mode), zero TCF and zero propagation attenuation for leaky SAW in the case of a short boundary at a thin film thickness of H/lambda (.)=. 0.15-0.25 (H: SiO2 film thickness, lambda: SAW wavelength). The experimental results agreed with the theoretical ones.

引用

页码：3480 / 3482

页数：3

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