Zero temperature coefficient of frequency surface acoustic wave resonator for narrow-duplex-gap application on SiO2/Al/LiNbO3 structure

被引：0
|
作者：
Nakanishi, Hidekazu [1 ,2 ]
Nakamura, Hiroyuki [1 ]
Tsurunari, Tetsuya [1 ]
Fujiwara, Joji [1 ]
Hamaoka, Yosuke [1 ]
Hashimoto, Ken-Ya [2 ]
机构：
[1] Panasonic Electronic Devices Co., Ltd., Kadoma, Osaka 571-8506, Japan
[2] Graduate School of Engineering, Chiba University, Chiba 263-8522, Japan
来源：
Japanese Journal of Applied Physics | 2011年 / 50卷 / 7 PART 2期
关键词：
Compendex;
D O I：
07HD13
中图分类号：
学科分类号：
摘要：
Silica
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