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- [5] The N2 diluted application in PECVD NF3 in-situ chamber cleaning for PFC reduction 2013 24TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2013, : 163 - 165
- [6] OXIDATION OF N2F4 TO NOF AND NF3 JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1964, 26 (11): : 2033 - 2034
- [10] MASS SPECTROMETRIC STUDY OF NF2, NF3, N2F2, AND N2F4 JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1961, A 65 (05): : 405 - +