Simulation and deposition of Tungsten oxide (WO3) films using DC sputtering towards UV photodetector for high responsivity

被引：0
|
作者：
G, Nithya [1 ,2 ]
Naveen Kumar, Kilari [3 ,4 ]
Shaik, Habibuddin [3 ,5 ]
Reddy, Sudheer [6 ]
Sen, Prosenjit [1 ]
Guru Prakash, Nunna [7 ]
Ansari, Mushtaq Ahmad [8 ]
机构：
[1] Center for Nano Science and Engineering, Indian Institute of Science, Bengaluru,560012, India
[2] Department of Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru,560064, India
[3] Department of Physics, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru,560064, India
[4] Centre for Nanomaterials and MEMS, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru,560064, India
[5] Department of Physics, Vignan's Foundation for Science, Technology and Research, Vadlamudi, Guntur,522213, India
[6] Department of Mechanical Engineering, Nitte Meenakshi Institute of Technology, Yelahanka, Bengaluru,560064, India
[7] School of Mechanical Engineering, Yeungnam University, 280 Daehak-ro, Gyeongsangbuk-do, Gyoungsan-si,38541, Korea, Republic of
[8] Department of Pharmacology and Toxicology, College of Pharmacy, King Saud University, P.O. Box 2457, Riyadh,11451, Saudi Arabia
来源：
Physica B: Condensed Matter | 2024年 / 695卷
关键词：
Compendex;
D O I：
10.1016/j.physb.2024.416555
中图分类号：
学科分类号：
摘要：
Magnetron sputtering - Oxide films - Photodetectors
引用
收藏
相关论文
共 50 条
  • [21] Sputtering deposition and characterization of Ru-doped WO3 thin films for electrochromic applications
    E. Cazzanelli
    M. Castriota
    R. Kalendarev
    A. Kuzmin
    J. Purans
    Ionics, 2003, 9 : 95 - 102
  • [22] Process optimization and effect of sputtering pressure on electrochromic properties of flexible WO3 films prepared by DC magnetron sputtering
    Ma, Huizhong
    Chen, Yunlong
    Li, Na
    Tan, Cong
    Rong, Yan
    Chen, Hongye
    Jia, Jia
    Zhang, Lan
    PHYSICA B-CONDENSED MATTER, 2023, 654
  • [23] Ammonia sensing at ambient temperature using tungsten oxide (WO3) nanoparticles
    Jeevitha, G.
    Mangalaraj, D.
    MATERIALS TODAY-PROCEEDINGS, 2019, 18 : 1602 - 1609
  • [24] Chemisynthesized tungsten oxide (WO3) electrodes for high-performance asymmetric supercapacitor application: effect of deposition time
    Patil, Sujata B.
    Nikam, Ranjit P.
    Lokhande, Chandrakant D.
    Patil, Raghunath S.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2023, 34 (28)
  • [25] Analysis of the influence of the gas pressure during the deposition of electrochromic WO3 films by reactive r.f. sputtering of W and WO3 target
    Masetti, E
    Grilli, ML
    Dautzenberg, G
    Macrelli, G
    Adamik, M
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1999, 56 (3-4) : 259 - 269
  • [26] Chemisynthesized tungsten oxide (WO3) electrodes for high-performance asymmetric supercapacitor application: effect of deposition time
    Sujata B. Patil
    Ranjit P. Nikam
    Chandrakant D. Lokhande
    Raghunath S. Patil
    Journal of Materials Science: Materials in Electronics, 2023, 34
  • [27] Synthesis of tungsten oxide (WO3) nanorods using carbon nanotubes as templates by hot filament chemical vapor deposition
    Shankar, N
    Yu, MF
    Vanka, SP
    Glumac, NG
    MATERIALS LETTERS, 2006, 60 (06) : 771 - 774
  • [28] Effective depth of electronic sputtering of WO3 films by high-energy ions
    Matsunami, N.
    Sataka, M.
    Okayasu, S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 460 : 185 - 188
  • [29] Electrochromism in surface modified crystalline WO3 thin films grown by reactive DC magnetron sputtering
    Karuppasamy, A.
    APPLIED SURFACE SCIENCE, 2013, 282 : 77 - 83
  • [30] Nanostructured WO3 films using high temperature anodization
    Kalantar-zadeh, Kourosh
    Sadek, Abu Z.
    Zheng, Haidong
    Bansal, Vipul
    Bhargava, Suresh K.
    Wlodarski, Wojtek
    Zhu, Jianmin
    Yu, Leshu
    Hu, Zheng
    SENSORS AND ACTUATORS B-CHEMICAL, 2009, 142 (01): : 230 - 235
12345