Process- and thin-film analysis in YIG thin film production for magnonic applications

被引：0
|
作者：
Pfuch, A. [1 ]
Reimann, T. [1 ]
Faldu, V. [1 ]
Seemann, T. [1 ]
Friedrich, T. [2 ]
Surzhenko, O. [1 ]
Beier, O. [1 ]
Gopakumar, A. [1 ]
机构：
[1] Innovent e. V., Jena, Germany
[2] Innovent e. V., Ernst-Abbe-Hochschule Jena, Jena, Germany
来源：
Galvanotechnik | 2024年 / 115卷 / 07期
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摘要：
Im Rahmen der hier durchgeführten Untersuchungen wurden Ergebnisse zur Abscheidung von YIG-Dünn- schichten vorgestellt, die mittels dc-Kathodenzerstäubung hergestellt wurden. Eine Kontrolle des dc-Sputterprozes- ses über ein genaues Monitoring der Entladungsspannun- gen sowie über eine exakte Bestimmung des Y/Fe-Elementverhältnisses in den Schichten sowie der ent- sprechenden optischen Schichteigenschaften erlaubt die Herstellung von zunächst amorphen Yttrium-Eisen-Gra- nat-Schichten mit stöchiometrischer Zusammensetzung.
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页码：922 / 925
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