Strain Characteristics of Surface Acoustic Wave Resonators on X-Cut LiTaO3

被引：0

作者：

Peng, Dingkang ^{[1
]}

Peng, Bin ^{[1
]}

Yang, Zhengzhong ^{[2
]}

Wang, Zhihao ^{[1
]}

Zhang, Wanli ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Device, Chengdu 610054, Peoples R China

[2] China Acad Engn Phys, Microsyst & Terahertz Res Ctr, Chengdu 610200, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2024年 / 24卷 / 16期

关键词：

Strain coefficient of frequency (SCF); strain sensor; surface acoustic wave (SAW); X-cut LiTaO3 (LT); SAW TEMPERATURE SENSOR; WIRELESS;

D O I：

10.1109/JSEN.2024.3418132

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work investigates the strain characteristics of surface acoustic wave (SAW) resonators fabricated on X-cut LiTaO3 (LT) substrates with varied Euler angles for exploring potential applications in strain sensing. The simulation and experimental results show that both Rayleigh wave and shear horizontal wave can be excited in (90 degrees, 90 degrees,Psi) LT substrates when Psi is ranged from 132 degrees to 162 degrees. The resonance frequencies of both Rayleigh wave and shear horizontal wave shift with applied strain. The strain coefficient of frequency (SCF) strongly depends on the acoustic wave propagation direction. The maximum sensitivities of Rayleigh wave and shear horizontal wave to applied strain are about -0.94 and -0.41 ppm/ mu epsilon for Psi=122 degrees and Psi=132 degrees, respectively. It is also found that some SAW resonators deposited on certain Euler angles exhibit insensitivity to applied strain. The results of this work provide valuable insights for designing and optimizing SAW strain sensors based on LT substrates.

引用

页码：25369 / 25373

页数：5

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