Structures of Giant Magnetoresistance Sensors for Magnetic Bead Detection

被引：0

作者：

Tan, Xi ^{[1
]}

Li, Zhixue ^{[1
]}

Gao, Xiaoping ^{[2
]}

Wu, Huiliang ^{[1
]}

Huang, Dandan ^{[1
]}

Liu, Weining ^{[1
]}

Zhao, Mingyang ^{[1
]}

Cheng, Qionglin ^{[1
]}

Ren, Yaqian ^{[1
]}

Chen, Yawen ^{[1
]}

Yi, Ming ^{[1
]}

Ding, Qi ^{[1
]}

Song, Yuzhe ^{[2
]}

Li, Hairong ^{[1
]}

机构：

[1] Lanzhou Univ, Sch Phys Sci & Technol, Lanzhou 730000, Peoples R China

[2] Gansu Acad Sci, Inst Sensor Technol, Key Lab Sensor & Sensing Technol, Lanzhou 730000, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2024年 / 24卷 / 22期

基金：

中国国家自然科学基金;

关键词：

Sensors; Magnetic sensors; Perpendicular magnetic anisotropy; Magnetic moments; Strips; Biosensors; Resistance; Giant magnetoresistance (GMR) sensor; magnetic bead; signal-to-noise ratio (SNR); simulation; GMR SENSORS; BIOSENSORS; NANOPARTICLES; IMMUNOASSAY; CHIP;

D O I：

10.1109/JSEN.2024.3426616

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study explores the fabrication of giant magnetoresistance (GMR) sensors through the microelectromechanical systems (MEMS) process. Moreover, it investigates the magnetic properties of these sensors across various structural parameters. In particular, the study evaluates the effects of variations in four specific parameters of a GMR sensor on magnetic bead signals, aiming to achieve high sensitivity of the sensor and a high signal-to-noise ratio (SNR) output. Dual ac modulation is employed for magnetic bead signal detection. The results indicate that a sensor with a linewidth of 1 mu m and line spacing of 5 mu m exhibits the highest signal output and a higher SNR.

引用

页码：36587 / 36593

页数：7

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