Gas temperature measurement in a surface-wave argon plasma column at low pressures

被引:0
|
作者
Palmero, A. [1 ]
Cotrino, J. [1 ]
Lao, C. [1 ]
Barranco, A. [1 ]
González-Elipe, A.R. [1 ]
机构
[1] Depto. de Fis. Atom., Molec. y Nucl., Facultad de Física, Universidad de Sevilla, E-41080 Sevilla, Spain
来源
| 2002年 / Japan Society of Applied Physics卷 / 41期
关键词
D O I
10.1143/jjap.41.5787
中图分类号
学科分类号
摘要
Plasma waves
引用
收藏
相关论文
共 50 条
  • [41] EFFICIENT PLASMA SURFACE-WAVE COUPLER
    SORENSEN, TP
    RISTIC, VM
    APPLIED PHYSICS LETTERS, 1973, 22 (10) : 508 - 510
  • [42] IONIZATION BY A PULSED PLASMA SURFACE-WAVE
    BLOYET, E
    LEPRINCE, P
    BLASCO, ML
    MAREC, J
    PHYSICS LETTERS A, 1981, 83 (08) : 391 - 392
  • [43] SELF-CONSISTENT MODELING OF SURFACE-WAVE PRODUCED DISCHARGES AT LOW-PRESSURES
    SA, AB
    FERREIRA, CM
    PASQUIERS, S
    BOISSELAPORTE, C
    LEPRINCE, P
    MAREC, J
    JOURNAL OF APPLIED PHYSICS, 1991, 70 (08) : 4147 - 4158
  • [44] ELECTRON DENSITY MEASUREMENT OF PLASMA COLUMN BY SURFACE WAVE RESONANCES
    AKAO, Y
    IDA, Y
    JOURNAL OF APPLIED PHYSICS, 1964, 35 (09) : 2565 - &
  • [45] Surface Wave Plasma Oxidation at Low Temperature under Rare Gas Dilution
    Goto, Masashi
    Azuma, Kazufumi
    Okamoto, Tetsuya
    Nakata, Yukihiko
    Goto, M., 1600, Japan Society of Applied Physics (42): : 7033 - 7038
  • [46] Surface wave plasma oxidation at low temperature under rare gas dilution
    Goto, M
    Azuma, K
    Okamoto, T
    Nakata, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (11): : 7033 - 7038
  • [47] TEMPERATURE EFFECTS IN SURFACE-WAVE DEVICES
    SCULZ, M
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1973, SU20 (01): : 60 - &
  • [48] Characteristics of surface-wave plasma with air-simulated N2-O2 gas mixture for low-temperature sterilization
    Xu, L.
    Nonaka, H.
    Zhou, H. Y.
    Ogino, A.
    Nagata, T.
    Nanko, S.
    Kurawaki, I.
    Nagatsu, M.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (03) : 803 - 808
  • [49] A novel technique for plasma density measurement using surface-wave transmission spectra
    Dine, S
    Booth, JP
    Curley, GA
    Corr, CS
    Jolly, J
    Guillon, J
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2005, 14 (04): : 777 - 786
  • [50] SPATIALLY-RESOLVED DISTRIBUTION OF EXCITED SPECIES IN AN ARGON SURFACE-WAVE PRODUCED PLASMA AT INTERMEDIATE PRESSURES (10-600 TORR) OBTAINED BY TOMOGRAPHY
    BESNER, A
    MARGOT, J
    BORDELEAU, S
    HUBERT, J
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1993, 48 (08) : 985 - 1001