SPATIALLY-RESOLVED DISTRIBUTION OF EXCITED SPECIES IN AN ARGON SURFACE-WAVE PRODUCED PLASMA AT INTERMEDIATE PRESSURES (10-600 TORR) OBTAINED BY TOMOGRAPHY

被引：1

作者：

BESNER, A ^{[1
]}

MARGOT, J ^{[1
]}

BORDELEAU, S ^{[1
]}

HUBERT, J ^{[1
]}

机构：

[1] UNIV MONTREAL,DEPT CHEM,POB 6128,STN A,MONTREAL H3C 3J7,QUEBEC,CANADA

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 1993年 / 48卷 / 08期

关键词：

D O I：

10.1016/S0584-8547(05)80004-7

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

Spatially resolved distributions of excited species have been obtained for argon, oxygen, hydrogen and nitrogen in plasmas produced by electromagnetic surface waves in a pressure range never studied before (10-600 torr) using a tomography technique. The effect of the frequency of operation on the distribution of the excited species in surface-wave plasmas has been studied between 27 and 2450 MHz. These three-dimensional distributions have been examined in argon and in gas mixtures of argon-oxygen, argon-hydrogen and argon-nitrogen. In general for the surface-wave plasma, the radial distribution of electric field and electron density are the main parameters that seem to govern the radial distribution of excited species.

引用

页码：985 / 1001

页数：17