Electrical properties and thermodynamic stability of Sr(Ti1-x,Rux)O3 thin films deposited by inductive-coupling-plasma-induced RF magnetron sputtering

被引：0
|
作者：
Ohara, Ryoichi [1 ]
Schimizu, Tatsuo [1 ]
Sano, Kenya [1 ]
Yoshiki, Masahiko [2 ]
Kawakubo, Takashi [1 ]
机构：
[1] Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corp., 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
[2] Material Analysis Group, Corporate Research and Development Center, Toshiba Corp., 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 3 A期
关键词：
Electric conductivity - Energy gap - Epitaxial growth - Ground state - Inductively coupled plasma - Magnetron sputtering - Sputter deposition - Strontium compounds - Substrates - Thermodynamic stability - X ray photoelectron spectroscopy;
D O I：
10.1143/jjap.40.1384
中图分类号：
学科分类号：
摘要：
Sr(Ti1-x,Rux)O3 (STRO) epitaxial thin films were deposited on single-crystal SrTiO3(100) substrates using the inductive-coupling-plasma-induced RF magnetron sputtering method without oxygen. The electrical conductivity of STRO films increases with Ru concentration and levels of the Ru 4d states are observed in the band gap of SrTiO3 by X-ray photoelectron spectroscopy (XPS) analysis. These results are consistent with those obtained by first-principles calculations. Thermodynamic stability increases with the decrease of Ru concentration, and STRO (x 2 atmosphere at 600C. This high resistance against reductive processes indicates that STRO (x
引用
收藏
页码：1384 / 1387
相关论文
共 50 条
  • [31] The effect of PbOx buffer layer on the properties of Pb(ZrxTi1-x)O3 thin films prepared by RF magnetron sputtering
    Wu, Jia-Gang
    Zhu, Ji-Liang
    Xiao, Ding-Quan
    Zhu, Jan-Gu
    Tan, Jun-Zhe
    Zhang, Qing-Lei
    FERROELECTRICS, 2007, 357 : 248 - 252
  • [32] PROPERTIES OF PB(ZRXTI1-X)O3 THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING AND HEAT-TREATMENT
    WANG, L
    PIGNOLET, A
    LEVY, F
    MATERIALS RESEARCH BULLETIN, 1990, 25 (12) : 1495 - 1501
  • [33] Evaluation of nanostructured BiZn0.5Ti0.5O3 thin films deposited by RF magnetron sputtering
    Romaguera-Barcelay, Y.
    Pedraca, A. S.
    Moreira, J. A.
    Almeida, A.
    Tavares, P. B.
    Brito, W. R.
    Matos, R. S.
    Pires, M. A.
    Pinto, E. P.
    da Fonseca Filho, H. D.
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2021, 267
  • [34] Electrical and microstructural degradation with decreasing thickness of (Ba, Sr)TiO3 thin films deposited by RF magnetron sputtering
    Paek, SH
    Won, JH
    Lee, KS
    Choi, JS
    Park, CS
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (11): : 5757 - 5762
  • [35] Highly (100)-oriented (Pb1-xLax)Ti1-x/4O3/Pb(Zr0.20Ti0.80)O3/(Pb1-xLax)Ti1-x/4O3 multilayered thin films by RE magnetron sputtering
    Wu, Jiagang
    Xiao, Dingquan
    Zhu, Jiliang
    Zhu, Jianguo
    Tan, Junzhe
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2007, 204 (07): : 2362 - 2368
  • [36] Structural and electrical properties of highly oriented Pb(Zr,Ti)O3 thin films deposited by facing target sputtering
    Li, XS
    Yamashita, K
    Tanaka, T
    Suzuki, Y
    Okuyama, M
    SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) : 265 - 269
  • [37] Pb(Zr.52Ti.48)O3 thin films on metal foils by RF magnetron sputtering
    Choi, SH
    Shih, WY
    Yi, JW
    Lee, YH
    Shih, WH
    MORPHOTROPIC PHASE BOUNDARY PEROVSKITES, HIGH STRAIN PIEZOELECTRICS, AND DIELECTRIC CERAMICS, 2003, 136 : 497 - 506
  • [38] Hydrothermal synthesis of Pb(Zrx, Ti1-x)O3 powders and heteroepitaxial thin films
    Chien, AT
    Kim, JH
    Yoon, YS
    Speck, JS
    Lange, FF
    CERAMIC PROCESSING SCIENCE, 1998, 83 : 329 - 329
  • [39] Structural and Electrical Properties of Ba(ZrxTi1-x)O3 Films Prepared by RF-magnetron Sputtering Using Metal Targets
    Kim, Jin Woong
    Shima, Hiromi
    Funakubo, Hiroshi
    Nishida, Ken
    Yamamoto, Takashi
    INTEGRATED FERROELECTRICS, 2014, 157 (01) : 101 - 113
  • [40] Structural and electrical properties of excess PbO doped Pb(Zr0.52Ti0.48)O3 thin films using rf magnetron sputtering method
    Kim, TS
    Kim, DJ
    Lee, JK
    Jung, HJ
    JOURNAL OF MATERIALS RESEARCH, 1998, 13 (12) : 3436 - 3441
12345