Synthesis of vertically aligned carbon nanofibers using inductively coupled plasma-enhanced chemical vapor deposition

被引：0
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作者：
Shoukat, Rizwan [1 ]
Khan, Muhammad Imran [2 ,3 ]
机构：
[1] Department of Microsystems Engineering – IMTEK, University of Freiburg, Freiburg,79110, Germany
[2] Department of Electronics Engineering, University of Engineering and Technology (UET), Taxila,47050, Pakistan
[3] Micro/-Nano Electronic System Integration R&D Center (MESIC), University of Science and Technology of China (USTC), Hefei,Anhui,230027, China
来源：
Electrical Engineering | 2018年 / 100卷 / 02期
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
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学科分类号：
摘要：
Nanocatalysts - Plasma enhanced chemical vapor deposition - Carbon nanofibers - Scanning electron microscopy - Plasma CVD - Substrates - Inductively coupled plasma
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页码：997 / 1002
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