Smooth layer for reducing roughness of EUV/soft x-ray multilayer substrate

被引：0
|
作者：
Zhang, Li-Chao
Jin, Chun-Shui
机构：
[1] State Key Lab. of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
[2] Graduate School, Chinese Academy of Sciences, Beijing 100039, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 2007年 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
8
引用
收藏
页码：27 / 29
相关论文
共 50 条
  • [31] X-ray and AFM studies of ultrathin films for EUV and soft X-ray applications
    Asadchikov, VE
    Duparré, A
    Kozhevnikov, IV
    Krivonosov, YS
    Sagitov, SI
    ADVANCES IN OPTICAL INTERFERENCE COATINGS, 1999, 3738 : 387 - 393
  • [32] Multilayer optics for coherent EUV/X-ray laser sources
    Delmotte, F.
    Dehlinger, M.
    Bourassin-Bouchet, Ch.
    de Rossi, S.
    Jerome, A.
    Meltchakov, E.
    Varniere, F.
    X-RAY LASERS AND COHERENT X-RAY SOURCES: DEVELOPMENT AND APPLICATIONS XI, 2015, 9589
  • [33] Surface roughness analysis of multilayer x-ray optics
    Martynov, Vladimir V.
    Platonov, Yuriy Y.
    ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS III, 2008, 7077
  • [34] Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions
    Michette, AG
    Wang, ZS
    OPTICS COMMUNICATIONS, 2000, 177 (1-6) : 47 - 55
  • [35] Soft X-ray optical multilayer mirrors
    BAI Haili
    Chinese Science Bulletin, 1999, (12) : 1057 - 1064
  • [36] EUV soft X-ray characterization of a FEL multilayer optics damaged by multiple shot laser beam
    Giglia, A.
    Mahne, N.
    Bianco, A.
    Svetina, C.
    Nannaronea, S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 635 : S30 - S38
  • [37] Soft X-ray multilayer beam splitters
    Haga, Tsuneyuki
    Tinone, Marcia C. K.
    Shimada, Masaru
    Ohkubo, Takashi
    Ozawa, Akira
    Journal of Synchrotron Radiation, 1998, 5 (03): : 690 - 692
  • [38] Soft X-ray optical multilayer mirrors
    Bai, HL
    Jiang, EY
    Wu, P
    Lou, ZD
    CHINESE SCIENCE BULLETIN, 1999, 44 (12): : 1057 - 1064
  • [39] Soft X-ray multilayer beam splitters
    Haga, T
    Tinone, MCK
    Shimada, M
    Ohkubo, T
    Ozawa, A
    JOURNAL OF SYNCHROTRON RADIATION, 1998, 5 : 690 - 692
  • [40] THE PERFORMANCE SIMULATION OF MULTILAYER REFLECTORS IN SOFT-X-RAY AND EUV REGIONS
    XU, S
    EVANS, BL
    MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING, 1994, 2 (05) : 1079 - 1092
12345