Growth and properties of microcrystalline silicon thin films

被引：0
|
作者：
机构：
[1] [1,2,Zhang, Xiaodan
[2] 1,2,Zhao, Ying
[3] 1,2,Gao, Yantao
[4] 1,2,Zhu, Feng
[5] 1,2,Wei, Changchun
[6] 1,2,Sun, Jian
[7] 1,2,Geng, Xinhua
[8] 1,2,Xiong, Shaozhen
来源：
Zhang, X. (xdzhang@nankai.edu.cn) | 2005年 / Science Press卷 / 25期
关键词：
12;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Photoelectrical properties of microcrystalline silicon films
    Forsh, PA
    Kazanskii, AG
    Mell, H
    Terukov, EI
    THIN SOLID FILMS, 2001, 383 (1-2) : 251 - 253
  • [32] Disilane as a growth rate catalyst of plasma deposited microcrystalline silicon thin films
    Dimitrakellis, P.
    Kalampounias, A. G.
    Spiliopoulos, N.
    Amanatides, E.
    Mataras, D.
    Lahootun, V.
    Coeuret, F.
    Madec, A.
    AIP ADVANCES, 2016, 6 (07):
  • [33] Shedding light on the growth of amorphous, polymorphous, protocrystalline and microcrystalline silicon thin films
    Morral, AFI
    Cabarrocas, PRI
    THIN SOLID FILMS, 2001, 383 (1-2) : 161 - 164
  • [34] Optoelectronic properties of microcrystalline silicon films
    Wünsch, F
    Citarella, G
    Kunst, M
    THIN SOLID FILMS, 2002, 403 : 526 - 529
  • [35] PHOTOLUMINESCENCE PROPERTIES IN MICROCRYSTALLINE SILICON FILMS
    LIU, HN
    TANG, WG
    FENG, XM
    LI, ZY
    JOURNAL OF LUMINESCENCE, 1988, 40-1 : 143 - 144
  • [36] Influence of RF-power on microstructure and properties of microcrystalline silicon thin films
    Zhang, Lin-Rui
    Zhou, Bing-Qing
    Zhang, Li-Li
    Li, Hai-Quan
    Rengong Jingti Xuebao/Journal of Synthetic Crystals, 2013, 42 (03): : 418 - 422
  • [37] Effect of Large Uniaxial Stress on the Thermoelectric Properties of Microcrystalline Silicon Thin Films
    Acosta, Edwin
    Smirnov, Vladimir
    Szabo, Peter S. B.
    Pillajo, Christian
    De la Cadena, Erick
    Bennett, Nick S.
    ELECTRONICS, 2022, 11 (24)
  • [38] Growth of crystalline grains in microcrystalline silicon films
    Lee, Gyu-Hyun
    Yoon, Jong-Hwan
    PHYSICAL REVIEW B, 2006, 73 (19):
  • [39] Instability effects in hydrogenated microcrystalline silicon thin films
    Yilmaz, G.
    Turan, E.
    Gunes, M.
    Smirnov, V.
    Finger, F.
    Brueggemann, R.
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7 NO 3-4, 2010, 7 (3-4): : 700 - 703
  • [40] MICROCRYSTALLINE SILICON THIN-FILMS FOR SENSOR APPLICATIONS
    GERMER, W
    SENSORS AND ACTUATORS, 1985, 7 (02): : 135 - 142
12345