共 50 条
- [23] Growth and properties of hydrogenated microcrystalline silicon thin films prepared by magnetron sputtering with different substrate temperatures Rare Metals, 2022, 41 : 1037 - 1042
- [24] Stress in hydrogenated microcrystalline silicon thin films AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999, 1999, 557 : 537 - 542