Nano-imprint lithography using replicated mold by Ni electroforming

被引：0
|
作者：
Hirai, Yoshihiko [1 ,2 ]
Harada, Satoshi [1 ]
Isaka, Satoshi [1 ]
Kobayashi, Michio [1 ]
Tanaka, Yoshio [1 ]
机构：
[1] [1,Hirai, Yoshihiko
[2] Harada, Satoshi
[3] Isaka, Satoshi
[4] Kobayashi, Michio
[5] Tanaka, Yoshio
来源：
Hirai, Y. (hirai@mecha.osakafu-u.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 41期
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摘要：
6
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页码：4186 / 4189
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