Nano-imprint lithography using replicated mold by Ni electroforming

被引：0
|
作者：
Hirai, Yoshihiko [1 ,2 ]
Harada, Satoshi [1 ]
Isaka, Satoshi [1 ]
Kobayashi, Michio [1 ]
Tanaka, Yoshio [1 ]
机构：
[1] [1,Hirai, Yoshihiko
[2] Harada, Satoshi
[3] Isaka, Satoshi
[4] Kobayashi, Michio
[5] Tanaka, Yoshio
来源：
Hirai, Y. (hirai@mecha.osakafu-u.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 41期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
6
引用
收藏
页码：4186 / 4189
相关论文
共 50 条
  • [21] 3D Simulation of Nano-Imprint Lithography
    Marin, Jose Manuel Roman
    Rasmussen, Henrik Koblitz
    Hassager, Ole
    NANOSCALE RESEARCH LETTERS, 2010, 5 (02): : 274 - 278
  • [22] Improvement of Nano-imprint Lithography performance for device fabrication
    Kono, Takuya
    Hatano, Masayuki
    Tokue, Hiroshi
    Kobayashi, Kei
    Kato, Hirokazu
    Suzuki, Masato
    Fukuhara, Kazuya
    Nakasugi, Tetsuro
    Choi, Eun Hyuk
    Jung, Wooyung
    NOVEL PATTERNING TECHNOLOGIES 2018, 2018, 10584
  • [23] Aluminum quantum dots fabrication by nano-imprint lithography
    Hirai, Y
    Yoshida, S
    Okuno, H
    Fujiwara, M
    Tanaka, Y
    MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS, 2000, : 292 - 293
  • [24] 3D Simulation of Nano-Imprint Lithography
    Jose Manuel Román Marín
    Henrik Koblitz Rasmussen
    Ole Hassager
    Nanoscale Research Letters, 5
  • [25] Controlled Morphologies by Molecular Design and Nano-Imprint Lithography
    Pfadler, Thomas
    Palumbiny, Claudia M.
    Pisula, Wojciech
    Hesse, Holger C.
    Feng, Xinliang
    Muellen, Klaus
    Mueller-Buschbaum, Peter
    Schmidt-Mende, Lukas
    ELEMENTARY PROCESSES IN ORGANIC PHOTOVOLTAICS, 2017, 272 : 215 - 242
  • [26] Silicon-containing molecules for nano-imprint lithography
    Mueller, Brennen K.
    Strahan, Jeffrey R.
    Bates, Christopher M.
    Lee, Jonathan A.
    Ellison, Christopher J.
    Willson, C. Grant
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2010, 239
  • [27] Enhanced transmittance of glass plates for solar cells using nano-imprint lithography
    Han, Kang-Soo
    Shin, Ju-Hyeon
    Lee, Heon
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2010, 94 (03) : 583 - 587
  • [28] Study on polymer materials evaluation system for nano-imprint lithography
    Sekiguchi, A
    Kono, Y
    Hirai, Y
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2005, 18 (04) : 543 - 549
  • [29] In situ UV nano-imprint lithography alignment using high contrast mark
    Qin, Jin
    Ding, Li
    Wang, Liang
    OPTICS EXPRESS, 2015, 23 (14): : 18518 - 18524
  • [30] Nano-imprint lithography: Templates, imprinting and wafer pattern transfer
    Dauksher, W. J.
    Le, N. V.
    Ainley, E. S.
    Nordquist, K. J.
    Gehoski, K. A.
    Young, S. R.
    Baker, J. H.
    Convey, D.
    Mangat, P. S.
    MICROELECTRONIC ENGINEERING, 2006, 83 (4-9) : 929 - 932
12345