Oblique-angle deposition: Evolution from sculptured thin films to bioreplication

被引:0
|
作者
Martín-Palma, Raúl J. [1 ]
Lakhtakia, Akhlesh [2 ]
机构
[1] Department of Materials Science and Engineering, Pennsylvania State University, University Park,PA,16802, United States
[2] Nanoengineered Metamaterials Group, Department of Engineering Science and Mechanics, Pennsylvania State University, University Park,PA,16802, United States
关键词
29;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:9 / 12
相关论文
共 50 条
  • [21] Glancing angle deposition of sculptured thin metal films at room temperature
    Liedtke, S.
    Gruener, Ch
    Lotnyk, A.
    Rauschenbach, B.
    NANOTECHNOLOGY, 2017, 28 (38)
  • [22] β-phase tungsten nanorod formation by oblique-angle sputter deposition
    Karabacak, T
    Mallikarjunan, A
    Singh, JP
    Ye, DX
    Wang, GC
    Lu, TM
    APPLIED PHYSICS LETTERS, 2003, 83 (15) : 3096 - 3098
  • [23] Magnetic properties of Co nanocolumns fabricated by oblique-angle deposition
    Tang, F
    Liu, DL
    Ye, DX
    Zhao, YP
    Lu, TM
    Wang, GC
    Vijayaraghavan, A
    JOURNAL OF APPLIED PHYSICS, 2003, 93 (07) : 4194 - 4200
  • [24] Evolution of sculptured thin films
    Messier, R
    Sunal, P
    Venugopal, V
    ENGINEERED NANOSTRUCTURAL FILMS AND MATERIALS, 1999, 3790 : 133 - 141
  • [25] Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence
    Inst Andaluz de Ciencias de la, Tierra-CSIC, Granada, Spain
    J Mater Res, 7 (1689-1692):
  • [26] Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence
    RodriguezNavarro, A
    OtanoRivera, W
    GarciaRuiz, JM
    Messier, R
    Pilione, LJ
    JOURNAL OF MATERIALS RESEARCH, 1997, 12 (07) : 1689 - 1692
  • [27] Nanostructured optical thin films fabricated by oblique angle deposition
    Sobahan K.M.A.
    Park Y.J.
    Kim J.J.
    Shin Y.S.
    Kim J.B.
    Hwangbo C.K.
    Advances in Natural Sciences: Nanoscience and Nanotechnology, 2010, 1 (04)
  • [28] Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence
    A. Rodríguez-Navarro
    W. Otaño-Rivera
    J. M. García-Ruiz
    R. Messier
    L. J. Pilione
    Journal of Materials Research, 1997, 12 : 1689 - 1692
  • [29] Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition
    Guo, Chun
    Kong, Mingdong
    Lin, Dawei
    Liu, Cunding
    Li, Bincheng
    OPTICS EXPRESS, 2013, 21 (01): : 960 - 967
  • [30] An influence of oblique-angle sputtering on ZnO:Ga thin film properties
    Flickyngerova, S.
    Netrvalova, M.
    Sutta, P.
    Novotny, I.
    Tvarozek, V.
    NINTH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, 2012, : 275 - 278