Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence

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Inst Andaluz de Ciencias de la, Tierra-CSIC, Granada, Spain [1 ]
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J Mater Res | / 7卷 / 1689-1692期
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We acknowledge the CSIC program for short stages in foreign institutions and support by the DGCYT project PB92-0967 (Spain); the Dupont Educational Grant Program (USA); and the 3M Grant-in-Aid Program (USA);
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