HYDROTHERMAL PREPARATION OF HIGHLY ORIENTED POLYCRYSTALLINE ZNO THIN-FILMS

被引:21
|
作者
CHEN, QW
QIAN, YT
CHEN, ZY
ZHANG, YH
机构
[1] UNIV SCI & TECHNOL CHINA,STRUCT RES LAB,HEFEI 230026,PEOPLES R CHINA
[2] CTR ADV STUDIES SCI & TECHNOL MICROSTRUCT,NANJING 210093,PEOPLES R CHINA
关键词
D O I
10.1016/0167-577X(94)00212-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Polycrystalline ZnO films on Si(100) substrates have been deposited hydrothermally. The films were prepared by hydrothermal treatment of zincite sol at 60-100 degrees C for 6 h and then at 100-200 degrees C for 6-12 h. They exhibited (<10(1)over bar 0>) preferential growth, and were found to be time dependent. The resulting layers, 650 Angstrom thick, were smooth, dense, homogeneous, and without visible pores.
引用
收藏
页码:93 / 95
页数:3
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