3D Stacking Process Technologies for Advanced CMOS Image Sensors

被引:0
|
作者
Iwamoto H. [1 ]
Kagawa Y. [1 ]
机构
[1] Sony Semiconductor Solutions Corporation, 4-14-1 Asahi-cho, Kanagawa, Atsugi-shi
关键词
D O I
10.5104/jiep.27.163
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学科分类号
摘要
[No abstract available]
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页码:163 / 168
页数:5
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