共 50 条
- [21] High Performance Nanopillars Array Silicon Solar Cells 2013 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2013,
- [24] Optical Properties of Silicon Nanowires Obtained by Metal-Assisted Chemical Etching Using Gold Nanoparticles JETP Letters, 2023, 117 : 111 - 115
- [26] Recrystallized parylene as a mask for silicon chemical etching 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2008, : 881 - +
- [29] An improved anisotropic wet etching process for the fabrication of silicon MEMS structures using a single etching mask MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 327 - +