Morphological instabilities in thin-film growth and etching

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作者：
Cahill, David G. [1 ]
机构：
[1] Dept. of Mat. Sci. and Engineering, Frederick Seitz Materials Res. Lab., University of Illinois, Urbana, IL 61801, United States
来源：
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 2003年 / 21卷 / 5 SUPPL.期
关键词：
Ion-induced viscosity - Linear stability analysis - Thermal diffusion constant - Thin-film growth;
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摘要：
(Edited Abstract)
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