Gallium nitride nanorods fabricated by inductively coupled plasma reactive ion etching

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作者：
Yu, Chang-Chin [1 ]
Chu, Chen-Fu [1 ]
Tsai, Juen-Yen [1 ]
Huang, Hung Wen [1 ]
Hsueh, Tao-Hung [1 ]
Lin, Chia-Feng [1 ]
Wang, Shing-Chung [1 ]
机构：
[1] Inst. of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan
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| 1600年 / Japan Society of Applied Physics卷 / 41期
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