Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity

被引：0
|
作者：
Singh, Mandeep [1 ]
Braat, Joseph J.M. [1 ]
机构：
[1] Optics Research Group, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, Netherlands
来源：
Applied Optics | 2000年 / 39卷 / 13期
关键词：
D O I：
10.1364/ao.39.002189
中图分类号：
学科分类号：
摘要：
26
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页码：2189 / 2197
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