Calculation of interfacial roughness of multilayers

被引：0
|
作者：
Feng, S.M. [1 ]
Shao, J.D. [1 ]
Zhao, Q. [1 ]
Tang, Z.S. [1 ]
Fan, Z.X. [1 ]
机构：
[1] Inst. of Optics and Fine Mech., Chinese Acad. of Sci., Shanghai 201800, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2001年 / 28卷 / 03期
关键词：
Diffraction - X rays;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper gives a simple formula for calculating the roughness of multilayer by using the small angle X-ray diffraction curves of the samples. The differences of the calculated values of roughness from the formula for the different pairs of peaks of a diffraction curve of the sample of different samples are very little, but the differences from B. Abples' formula are considerably large. The calculated results are also in good conformity with the measured values reported.
引用
收藏
页码：249 / 252
相关论文
共 50 条
  • [31] Interfacial roughness of partially correlated metallic multilayers studied by non-specular X-ray reflectivity
    Paniago, R
    Homma, H
    Chow, PC
    Reichert, H
    Moss, SC
    Barnea, Z
    Parkin, SSP
    Cookson, D
    PHYSICA B, 1996, 221 (1-4): : 10 - 12
  • [32] Interface roughness in Mo/Si multilayers
    Nedelcu, I.
    de Kruijs, R. W. E. van
    Yakshin, A. E.
    Tichelaar, F.
    Zoethout, E.
    Louis, E.
    Enkisch, H.
    Muellender, S.
    Bijkerk, F.
    THIN SOLID FILMS, 2006, 515 (02) : 434 - 438
  • [33] Dipolar effects in multilayers with interface roughness
    Vargas, P
    Altbir, D
    PHYSICAL REVIEW B, 2000, 62 (10): : 6337 - 6342
  • [34] Intrinsic roughness and interfaces of Cr/Be multilayers
    Pleshkov, Roman
    Chkhalo, Nikolay
    Polkovnikov, Vladimir
    Svechnikov, Mikhail
    Zorina, Maria
    JOURNAL OF APPLIED CRYSTALLOGRAPHY, 2021, 54 : 1747 - 1756
  • [35] X-ray scattering study of interfacial roughness correlation in Mo/Si multilayers fabricated by ion beam sputtering
    Ulyanenkov, A
    Matsuo, R
    Omote, K
    Inaba, K
    Harada, J
    Ishino, M
    Nishii, M
    Yoda, O
    JOURNAL OF APPLIED PHYSICS, 2000, 87 (10) : 7255 - 7260
  • [36] A research of interfacial E - sheng Tang roughness of multilayers for soft X-ray mirrors in 'water window' range
    Poverkhnost Fiz Khim Mekh, 3-4 (43-51):
  • [37] Interfacial reactions in Al/Ni multilayers
    Takahashi, F
    Greer, AL
    MECHANICALLY ALLOYED, METASTABLE AND NANOCRYSTALLINE MATERIALS, PART 2, 1998, 269-2 : 601 - 606
  • [38] INTERFACIAL DISPLACEMENTS IN MULTILAYERS WITH SIMILAR LATTICES
    TSAKALAKOS, T
    KHACHATURYAN, AG
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1990, 6 (2-3): : 123 - 127
  • [39] INTERFACIAL STRUCTURE OF CO/PT MULTILAYERS
    YAN, X
    EGAMI, T
    PHYSICAL REVIEW B, 1993, 47 (04): : 2362 - 2368
  • [40] Interface roughness in strained Si/SiGe multilayers
    Darhuber, AA
    Holy, V
    Stangl, J
    Bauer, G
    Nutzel, J
    Abstreiter, G
    CONTROL OF SEMICONDUCTOR SURFACES AND INTERFACES, 1997, 448 : 153 - 158
12345