Calculation of interfacial roughness of multilayers

被引：0

作者：

Feng, S.M. ^{[1
]}

Shao, J.D. ^{[1
]}

Zhao, Q. ^{[1
]}

Tang, Z.S. ^{[1
]}

Fan, Z.X. ^{[1
]}

机构：

[1] Inst. of Optics and Fine Mech., Chinese Acad. of Sci., Shanghai 201800, China

来源：

Zhongguo Jiguang/Chinese Journal of Lasers | 2001年 / 28卷 / 03期

关键词：

Diffraction - X rays;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

This paper gives a simple formula for calculating the roughness of multilayer by using the small angle X-ray diffraction curves of the samples. The differences of the calculated values of roughness from the formula for the different pairs of peaks of a diffraction curve of the sample of different samples are very little, but the differences from B. Abples' formula are considerably large. The calculated results are also in good conformity with the measured values reported.

引用

页码：249 / 252

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