A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate

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[1] Chen, Ming-Fei
[2] Hsiao, Wen-Tse
[3] Wang, Ming-Cheng
[4] Yang, Kai-Yu
[5] Chen, Ying-Fang
来源：
Hsiao, Wen-Tse (wentse@itrc.narl.org.tw) | 1723年 / Springer London卷 / 81期
关键词：
This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters; such as laser fluence; number of pulses and its duration; and frequency; on morphology—depth; diameter; taper; and temperature distribution—was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experimental results reveal that higher laser fluence and number of pulses produces larger drilling depths and diameters. Laser fluence; pulse duration; frequency; and pulse number of 5.10 J/cm2; 1000 μs; 20 kHz; and; >9; respectively; can successfully drill through the alumina ceramic substrate. Pulse duration between 3 and 8 ms yielded the smallest hole taper. © 2015; Springer-Verlag London;
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