Effect of substrate temperature on residual stress in Ag-MgF2 cermet films

被引:0
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作者
Li, Aixia [1 ]
Sun, Daming [1 ]
Sun, Zhaoqi [1 ]
Song, Xueping [1 ]
Zhao, Zongyan [1 ]
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[1] Dept. of Phys., Anhui Univ., Hefei 230039, China
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14
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页码:22 / 26
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