Effects of thinning SiO2 films on light emission properties of silicon nanoquantum dots formed by self-assembled growth

被引：0
|
作者：
Peng, Yingcai [1 ]
Takeuchi, K. [1 ]
Inage, S. [1 ]
Miyazaki, S. [1 ]
机构：
[1] Coll. of Electron. and Info. Eng., Hebei Univ., Baoding 071002, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2002年 / 23卷 / 03期
关键词：
Self assembled growth - Silicon nanoquantum dots - Ultrathin silica films;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：267 / 271
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