Effects of thinning SiO2 films on light emission properties of silicon nanoquantum dots formed by self-assembled growth

被引:0
|
作者
Peng, Yingcai [1 ]
Takeuchi, K. [1 ]
Inage, S. [1 ]
Miyazaki, S. [1 ]
机构
[1] Coll. of Electron. and Info. Eng., Hebei Univ., Baoding 071002, China
来源
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2002年 / 23卷 / 03期
关键词
Self assembled growth - Silicon nanoquantum dots - Ultrathin silica films;
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学科分类号
摘要
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页码:267 / 271
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