Impact of bias on the graphite-like carbon films grown by high power impulse magnetron sputtering

被引：0
|
作者：
Zhang, Xueqian [1 ,2 ]
Huang, Meidong [1 ]
Ke, Peiling [2 ]
Wang, Aiying [2 ]
机构：
[1] Tianjin Normal University, Tianjin 300387, China
[2] Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2013年 / 33卷 / 10期
关键词：
Magnetron sputtering;
D O I：
10.3969/j.issn.1672-7126.2013.10.03
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：969 / 974
相关论文
共 50 条
  • [1] Graphite-like carbon films by high power impulse magnetron sputtering
    Huang, Meidong
    Zhang, Xueqian
    Ke, Peiling
    Wang, Aiying
    APPLIED SURFACE SCIENCE, 2013, 283 : 321 - 326
  • [2] Diamond-like/graphite-like carbon composite films deposited by high-power impulse magnetron sputtering
    Li, Xu
    Dai, Wei
    Wang, Qimin
    Liang, Yunpeng
    Wu, Zhengtao
    DIAMOND AND RELATED MATERIALS, 2020, 106
  • [3] Preparation and properties of graphite-like carbon films fabricated by unbalanced magnetron sputtering
    Wang Yong-Jun
    Li Hong-Xuan
    Ji Li
    Liu Xiao-Hong
    Wu Yan-Xia
    Zhou Hui-Di
    Chen Jian-Min
    ACTA PHYSICA SINICA, 2012, 61 (05)
  • [4] Influences of target power and pulse width on the growth of diamond-like/graphite-like carbon coatings deposited by high power impulse magnetron sputtering
    Dai, Wei
    Li, Xu
    Wu, Liang
    Wang, Qimin
    Diamond and Related Materials, 2021, 111
  • [5] Influences of target power and pulse width on the growth of diamond-like/graphite-like carbon coatings deposited by high power impulse magnetron sputtering
    Dai, Wei
    Li, Xu
    Wu, Liang
    Wang, Qimin
    DIAMOND AND RELATED MATERIALS, 2021, 111
  • [6] Diamond-like carbon films prepared by high power impulse magnetron sputtering
    Lomon, Jidapa
    Chaiyabin, Ponthip
    Songsiriritthigul, Prayoon
    Saisopa, Thanit
    Seawsakul, Kittikhun
    Saowiang, Nopphon
    Poolcharuansin, Phitsanu
    Chingsungnoen, Artit
    Supruangnet, Ratchadaporn
    Chanlek, Narong
    Nakajima, Hideki
    MATERIALS TODAY-PROCEEDINGS, 2019, 17 : 1549 - 1554
  • [7] Study on the microstructure and properties of graphite-like carbon films deposited by unbalanced magnetron sputtering
    Wang, Yongjun
    Li, Hongxuan
    Ji, Li
    Zhao, Fei
    Li, Jian
    Liu, Xiaohong
    Wu, Yanxia
    Lv, Yanhong
    Fu, Yingying
    Zhou, Huidi
    Chen, Jianmin
    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY, 2012, 226 (J8) : 714 - 721
  • [8] Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering
    Wang, Yongxin
    Wang, Liping
    Zhang, Guangan
    Wang, S. C.
    Wood, R. J. K.
    Xue, Qunji
    SURFACE & COATINGS TECHNOLOGY, 2010, 205 (03): : 793 - 800
  • [9] Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering
    Chen, Jianmin
    Wang, Yongjun
    Li, Hongxuan
    Ji, Li
    Wu, Yanxia
    Lv, Yanhong
    Liu, Xiaohong
    Fu, Yingying
    Zhou, Huidi
    TRIBOLOGY LETTERS, 2013, 49 (01) : 47 - 59
  • [10] Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering
    Wang, Yongjun
    Li, Hongxuan
    Ji, Li
    Zhao, Fei
    Kong, Qinghua
    Wang, Yongxia
    Liu, Xiaohong
    Quan, Weilong
    Zhou, Huidi
    Chen, Jianmin
    SURFACE & COATINGS TECHNOLOGY, 2011, 205 (8-9): : 3058 - 3065
12345