Diamond-like carbon films prepared by high power impulse magnetron sputtering

被引：2

作者：

Lomon, Jidapa ^{[1
,2
]}

Chaiyabin, Ponthip ^{[1
,2
]}

Songsiriritthigul, Prayoon ^{[1
,2
]}

Saisopa, Thanit ^{[1
,2
]}

Seawsakul, Kittikhun ^{[1
,2
]}

Saowiang, Nopphon ^{[3
]}

Poolcharuansin, Phitsanu ^{[3
]}

Chingsungnoen, Artit ^{[3
]}

Supruangnet, Ratchadaporn ^{[4
]}

Chanlek, Narong ^{[4
]}

Nakajima, Hideki ^{[4
]}

机构：

[1] Suranaree Univ Technol, Sch Phys, Nakhon Ratchasima 30000, Thailand

[2] Commiss Higher Educ, ThEP Ctr, Bangkok 10400, Thailand

[3] Mahasarakham Univ, Dept Phys, Maha Sarakham 44150, Thailand

[4] Synchrotron Light Res Inst, Nakhon Ratchasima 30000, Thailand

来源：

MATERIALS TODAY-PROCEEDINGS | 2019年 / 17卷

关键词：

Diamond-like carbon; DLC; HiPIMS; XPS; XAS;

D O I：

10.1016/j.matpr.2019.06.180

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) thin films were prepared by high power impulse magnetron sputtering (HiPIMS) with different deposition conditions. The main variable parameters were the argon flow rate, and deposition time. The carbon films were characterized by X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS). The results from the XPS measurements show that the DLC films are composed of two main different carbon species; i.e. carbon with sp(3) and sp(2) configurations. The XAS measurements reveal that the DLC films contain hydrogen. The present of hydrogen affects the sheet resistivity of the films. The resistance of the DLC films increases exponentially when the temperature decreases. (C) 2019 Elsevier Ltd. All rights reserved.

引用

页码：1549 / 1554

页数：6

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