Silicon carbon nitride thin film produced by hot-filament chemical vapor deposition

被引：0
|
作者：
Zhao, Wu [1 ]
Qu, Ya-Dong [1 ]
Zhang, Zhi-Yong [1 ]
Yun, Jiang-Ni [1 ]
Fan, Ding-Ding [1 ]
机构：
[1] Information Science and Technical Institute, Northwest University, Xi'an 710127, China
来源：
Zhongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Central South University (Science and Technology) | 2010年 / 41卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：156 / 160
相关论文
共 50 条
  • [31] Diamond synthesis on silicon nitride by the hot filament chemical vapor deposition technique
    Polini, R
    Mattei, G
    Marucci, A
    Traversa, E
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1998, 106 (12) : 1167 - 1171
  • [32] Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition
    Kim, Ki-Hwan
    Lefeuvre, Emmanuel
    Chatelet, Marc
    Pribat, Didier
    Cojocaru, Costel-Sorin
    THIN SOLID FILMS, 2011, 519 (14) : 4598 - 4602
  • [33] STRUCTURAL STUDY OF DIAMOND FILM FORMED ON SILICON-WAFER BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION METHOD
    YANG, J
    LIN, ZD
    WANG, LX
    JIN, S
    ZHANG, Z
    APPLIED PHYSICS LETTERS, 1994, 65 (25) : 3203 - 3205
  • [34] Tantalum carbide-graphite composite film synthesized by hot-filament chemical vapor deposition
    Ali, Mubarak
    Urgen, Mustafa
    PURE AND APPLIED CHEMISTRY, 2012, 84 (12) : 2499 - 2506
  • [35] NUCLEATION BEHAVIOR OF DIAMOND PARTICLES ON SILICON SUBSTRATES IN A HOT-FILAMENT CHEMICAL VAPOR-DEPOSITION
    PARK, SS
    LEE, JY
    JOURNAL OF MATERIALS SCIENCE, 1993, 28 (07) : 1799 - 1804
  • [36] The effects of bias polarity on diamond deposition by hot-filament chemical vapor deposition
    Chen, W
    Xiao, C
    Yang, Q
    Moewes, A
    Hirose, A
    CANADIAN JOURNAL OF PHYSICS, 2005, 83 (07) : 753 - 759
  • [37] Perfluorooctane sulfonyl fluoride as an initiator in hot-filament chemical vapor deposition of fluorocarbon thin films
    Lewis, HGP
    Caulfield, JA
    Gleason, KK
    LANGMUIR, 2001, 17 (24) : 7652 - 7655
  • [38] ORIENTED GROWTH OF A DIAMOND FILM ON SI(100) BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION
    ZHANG, XX
    SHI, TS
    WANG, JX
    ZHANG, XK
    JOURNAL OF CRYSTAL GROWTH, 1995, 155 (1-2) : 66 - 69
  • [39] Boron nitride phosphide thin films grown on quartz substrate by hot-filament and plasma-assisted chemical vapor deposition
    Zhang, XW
    Xu, SY
    Han, GR
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2004, 201 (13): : 2922 - 2928
  • [40] Simultaneous growth of diamond and nanostructured graphite thin films by hot-filament chemical vapor deposition
    Ali, M.
    Urgen, M.
    SOLID STATE SCIENCES, 2012, 14 (01) : 150 - 154
12345