Integrated, Turnkey modeling and measurement systems: Turnkey solutions for semiconductor on-wafer measurements

被引：0
|
作者：
Yanagimoto, Yoshiyuki [1 ]
机构：
[1] Keysight Technologies, United States
来源：
Microwave Journal | 2016年 / 59卷 / 03期
关键词：
Semiconductor devices - Silicon wafers;
D O I：
暂无
中图分类号：
TN3 [半导体技术]; TN4 [微电子学、集成电路（IC）];
学科分类号：
0805 ; 080501 ; 080502 ; 080903 ; 1401 ;
摘要：
Time-to-market cycles are shrinking and the need for even greater accuracy is increasing, as semiconductor technology continues to evolve. These challenges demand an integrated, turnkey system that can quickly and accurately perform advanced DC, RF/microwave/mmWave, high power and flicker noise measurements on semiconductor components and devices. Keysight Technologies and Cascade Microtech set out to deliver this type of system in June 2014 and launched wafer-level measurement solutions (WMS).
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页码：20 / 42
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