共 50 条
- [42] Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering SURFACE & COATINGS TECHNOLOGY, 2004, 184 (01): : 84 - 92
- [43] Transparent and conductive multicomponent oxide films prepared by magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (04): : 1765 - 1772
- [48] A study of transparent conductive indium antimony oxide films deposited by RF magnetron sputtering Metals and Materials International, 2008, 14
- [49] Growth of IGZO Thin Films and Fabrication of Transparent Thin Film Transistor by RF Magnetron Sputtering NANOSTRUCTURED THIN FILMS VI, 2013, 8818