Fabrication of transparent conductive ZAO film by DC magnetron sputtering and properties study

被引：0
|
作者：
机构：
[1] Chen, Xiao-Yan
[2] Wang, Jing
[3] Ding, Yu-Tian
来源：
Ding, Y.-T. | 1600年 / Journal of Functional Materials, P.O. Box 1512, Chongqing, 630700, China卷 / 44期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Effects of oxygen partial pressure on the properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering
    Ma Quan-Bao
    Ye Zhi-Zhen
    He Hai-Ping
    Zhu Li-Ping
    Zhang Yin-Zhu
    Zhao Bing-Hui
    JOURNAL OF INORGANIC MATERIALS, 2007, 22 (06) : 1113 - 1116
  • [32] Preparing conductive transparent ITO films on glass at 200°C by RF and DC magnetron sputtering
    Ishida, T.
    Kobayashi, H.
    Mochizuki, S.
    Tabata, O.
    Shinku/Journal of the Vacuum Society of Japan, 2001, 44 (06) : 588 - 591
  • [33] Effect of sublayer surface treatments on ZnO transparent conductive oxides using dc magnetron sputtering
    Imanishi, Yasuo
    Taguchi, Mitsuo
    Onisawa, Ken-ichi
    THIN SOLID FILMS, 2010, 518 (11) : 2945 - 2948
  • [34] Transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering at low temperature
    Bie, X.
    Lu, J. G.
    Gong, L.
    Lin, L.
    Zhao, B. H.
    Ye, Z. Z.
    APPLIED SURFACE SCIENCE, 2009, 256 (01) : 289 - 293
  • [35] Effect of sputtering power on the properties of ZnO:Ga transparent conductive oxide films deposited by pulsed DC magnetron sputtering with a rotating cylindrical target
    Ahn, Kyung-Jun
    Park, Ji-Hyeon
    Shin, Beom-Ki
    Lee, Woong
    Yeom, Geun Young
    Myoung, Jae-Min
    APPLIED SURFACE SCIENCE, 2013, 271 : 216 - 222
  • [36] Reactive DC Magnetron Sputtering Deposited ZnMgO Transparent Thin-Film Transistors
    Lin, X.
    Jiang, B. B.
    Li, S. J.
    Li, Y. L.
    He, X.
    Zhang, S. D.
    PROCEEDINGS OF CHINA DISPLAY/ASIA DISPLAY 2011, 2011, : 568 - 571
  • [37] Effects of substrate temperature on the properties of heavy Ga-doped ZnO transparent conductive film by RF magnetron sputtering
    Wang, Shufang
    Li, Xifeng
    Zhang, Jianhua
    8TH CHINA INTERNATIONAL NANOSCIENCE AND TECHNOLOGY SYMPOSIUM (CINSTS09), 2009, 188
  • [38] Transparent, conductive ZnO:Al thin film deposited on polymer substrates by RF magnetron sputtering
    Fortunato, E
    Nunes, P
    Marques, A
    Costa, D
    Aguas, H
    Ferreira, I
    Costa, MEV
    Godinho, MH
    Almeida, PL
    Borges, JP
    Martins, R
    SURFACE & COATINGS TECHNOLOGY, 2002, 151 : 247 - 251
  • [39] Electrical and optical properties of molybdenum-doped ZnO transparent conductive thin films prepared by dc reactive magnetron sputtering
    Wu, Chenguo
    Shen, Jie
    Ma, Jin
    Wang, Sanpo
    Zhang, Zhuangjian
    Yang, Xiliang
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2009, 24 (12)
  • [40] Effects of oxygen concentration on the properties of Al-doped ZnO transparent conductive films deposited by pulsed DC magnetron sputtering
    Kim, Doo-Soo
    Park, Ji-Hyeon
    Lee, Su-Jeong
    Ahn, Kyung-Jun
    Lee, Mi-So
    Ham, Moon-Ho
    Lee, Woong
    Myoung, Jae-Min
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2013, 16 (03) : 997 - 1001
12345